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    ST8370全自动三瓶特殊气体输送柜

    Applied to the semiconductor industry:

    Subsidiary Equipment-Gas Equipment-气柜

    Product brand

    盛韬

    In stock:

    100

    Place of origin:

    National

    Quantity:

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    price:

    Negotiable
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    Own series:Subsidiary Equipment-Gas Equipment-气柜

    ST8370全自动三瓶特殊气体输送柜
    全自动三瓶GC

      ST8370全自动三瓶特殊气体输送柜是专为易燃易爆、腐蚀性、毒性等危险性气体供应而设计的供应系统,基本功能包括自动吹扫、自动切换以及紧急情况下的自动安全切断(当设定报警信号被触发时)。ST8320全自动气柜通过采用PLC控制,触控屏为人机界面,通过设备安装的压力传感器、气动阀、过流量计等装置,实现设备安全有效的运行。其内部PLC程式设计的安全联锁功能和高纯阀件的合理选择和布局,既满足了半导体工艺生产过程中对特殊气体连续供给和高纯度的要求,同时也确保了工厂正常生产和员工人身安全。
      适合气体: 易燃性,腐蚀性,毒性气体,诸如SiH4, NF3, NH3, N2O, HCl等。
      适用行业: Semiconductor、TFT、Sun Solar、LED等工厂。

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