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    Laser Plane Interferometers

    Applied to the semiconductor industry:

    Testing Equipment-Surface&internal Inspection-表面形貌检测

    Product brand

    MCF

    Specification model:

    FM/150-LP

    In stock:

    1000

    Place of origin:

    China-北京市

    Quantity:

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    price:

    Negotiable
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    Brand:MCF

    model:FM/150-LP

    Own series:Testing Equipment-Surface&internal Inspection-表面形貌检测

    品牌:MCF


    FM/150-LP laser plane interferometers

    原理:斐索干涉仪是一种原理为等厚干涉,用以检测光学元件的面形、光学镜头的波面像差以及光学材料均匀性等的精密仪器。其测量精度一般为1/101/100,为检测用光源的平均波长。

    功能:平面光学元件的表面面型测量
          Surface measurement and optical parallelism
          光学平行度测量                            
          measuremen of plane optical elements

    技术参数
    /General specifications

    测量方式:斐索干涉原理                    Tesr Type:Fizeau interferometry

    通光口径:150mm                              Test Beam:Φ150mm

    测试波长:632.8nm(He-Ne激光器)    Test Wavelength:632.8nm(He-Ne laser)

    对准方式:简单两点对准                    AlignmentSimple two spot alignment

    对准视场:±0.5                               Alignment View±0.5degrees

    平面标准镜精度:PVλ/20               Reference mirror:PV: λ/20

    尺寸:450*400*800mm                     Size450*400*800mm

    重量:约80Kg                                     Weight:80Kg


    产品图片:

     

    特点/ Features

    1.   结构紧凑,小型化

    2.   可进行整盘检测

    3.   具有不损伤被测物品、测试精度高、测量时间短;

    4.   激光干涉仪的光源——激光,具有高强度、高度方向性、空间同调性、窄带宽和高度单色性等优点;

    5.   激光干涉仪可配合各种折射镜、反射镜等来使用;

    6.   激光干涉仪测量范围大、分辨率高等。


    应用范围:科学研究、精密器件加工及光学零件测试等领域的广泛应用。


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