扬州市神州科技有限公司成立于2003年，现有专业技术人员40人, 员工50人, 专业从事射频等离子体电源的维修、维护及销售，主要服务内容包括：为半导体工厂，液晶面板工厂等提供AE, MKS(ENI), DAIHEN, AD-TEC, KYOSAN, RFPP等国际品牌的射频电源、直流电源、匹配器、RPS及各类半导体设备维修、销售、客户方案定制与老式机型替代，并提供现场支持服务。
公司主要客户：TSMC, HYNIX, SMIC, IVO, JCAP, MEMSIC, HHNEC, SZ TIANMA, HEJIAN, JA SOLAR,SONY, TOSHIBA, BEST SOLAR等。
二、产品介绍
AE CESAR 1310 RF Generator 13.56MHz(1000W) 射频电源
| Specification | |
| Frequency | 13.560 MHz +/- 0.005% |
| Max output power | 1000 W into a 50??load |
| Min output power | 10 W into a 50??load |
| Reflected power limit | 200 W |
| Delivered power into mismatch | 20% depending on the load impedance |
| Load impedance | 50Ω |
| RF connector | 50Ω, N-type, female |
| RF power regulation mode | P forward, P delivered, or DC selfbias voltage |
| Regulation (of set point) | 1.0 or 0.1% of full-rated power, whichever is greater, into a 50Ωload |
| Harmonics | -50 dBc at full-rated power |
| Spurious content | -60 dBc max at full-rated power |
| Pulse mode | Yes |
| Pulse repetition frequency | 1 to 30 kHz |
| Pulse duty cycle | 1% to 99% |
| CEX operation mode | Yes |
| CEX input signal as required | 0 to +10 dbm |
| CEX output signal specifications | +3 to +10 dbm |
| CEX connector (50??) | BNC, female |
| Display | LCD graphic display |
| 256 x 132 dots , black / white | |
| Cooling | Air cooling |
| Air cooling requirement | 118 m/h3 |
| AC Power Line | |
| AC line voltage (1-phase) | 230 VAC (187 AC to 253 VAC) |
| AC line frequency | 50/60 Hz |
| AC line current (per phase) | 6.5 A nominal line, full power |
| AC input power | 1490 VA |
| Overcurrent limit (per phase) | 10 A to be created by user through fuse or circuit breaker |
| Efficiency line to load | 66% at full power, nominal line |
| Power factor | 97% to 99% at max power |
| AC mains connection | IEC 320 at full power |
更多信息请与我们联系！
三、品质保障
我们所销售的电源、匹配器及RPS等如无特殊说明，均提供6个月的免费保修服务。
我们为销售产品提供终身维修服务，并可提供EXCHANGE服务，保证客户的生产正常进行。
四、运输
我们为所有出厂的机器提供最结实的包装，保证运输过程中机器的安全。