As a new generation of high performance direct drive motors, the XY Series platform of positive microscope linear motor has the advantages of no backhaul clearance, high precision, wide dynamic speed range, high reliability and maintenance-free. Heidexing Technology pioneered the application of magnetic levitation linear motor in semiconductor industry on the microscope scanning platform. It breaks through the bottlenecks of traditional products in scanning applications and micro-operation. Its features of never wearing and maintenance-free are completely incomparable with traditional motors. It is the best choice for advanced applications such as high-precision scanning, pathological examination, microscopic operation, wafer analysis and so on.
Product parameters
Trip： 80mm（Xaxis） x 60mm（Yaxis）
Minimum speed： ≤1um/s
Maximum speed： ≥100mm/s
Min step size*： ≤50nm
Bidirectional Repeated Location Accuracy**： ≤1um（Test Standard ISO230-2）
positioning accuracy**： ≤±2um（Test Standard ISO230-2）
Orthogonality： ≤10arc·sec
Electric machinery： Maglev linear motor
Encoder Resolution： 156nm（Optional higher resolution encoder）
Bearing： Precision cross ball bearing
Limit mode： Triple Limit, Soft Limit + Photoelectric Limit + Mechanical Limit
Texture of material： Aluminum alloy 6061-T6
Surface treatment： Black Anodic Oxidation
weight： 3.2kg
Maximum load： ≤1.5kg
* Please consult the manufacturer directly for the minimum step size.
** All valid accuracy requires the use of Hyde Star Standard Controller
Ordering Information
1. Order model HDS-MS-XY8060LE156-I
2. When ordering, please specify the type of microscope used.
Currently, the supported microscope models are:
OLMPUS (Olympus): CX4/BX41/BX43/BX51/BX53
NIKON (Nikon): Ci/Ci-E/Ni
ZEISS (Zeiss): AXIO SCOPE A1
SUNNY OPTIC (Shunyu Optics): CX40/RX50
3. Optional standard slice holder (excluding slice holder in standard product list)
4. Optional Manual Rocker Controller
5. In order to protect the safety of operators and equipment, the manufacturer limits the maximum speed and acceleration when leaving the factory. Consult the manufacturer if required.
6. If the model used is not in the supported model, please consult the manufacturer directly.
7. Acceptable special customization