NanoMap-500LS Probe Three-dimensional Profiler (Step Instrument)

Model

NanoMap-500LS

NanoMap-LS

NanoMap-ES

Basic technical parameters

With two modes of Tip and Stage, not only long-range and large-area measurements can be completed, but also the optimal two-dimensional/three-dimensional observation maps in small areas can be obtained. Short-range probe scanning adopts precise piezoelectric ceramic drive scanning mode, the three-dimensional scanning range is from 10 micron X 10 micron to 500 micron X 500 micron, with sub-nanometer vertical resolution (minimum 0.1 nanometer); long-range sample table scanning uses advanced optical reference platform, which can make the scanning range reach 150 mm. These two scanning modes provide users with precise and fast scanning respectively. It is suitable for all-material measurement and can accept almost any material surface. In the process of scanning, the sample can be observed directly with color optical camera.

Step repetition rate

5A

Fine mode Z height range

5μm

Coarse Mode Z Height Range

500μm(Optional 1.5mm)

Tip Scan Model (XY)

Max500μm

NO

最大500μm

Stage Scan Model (XY)

Max150mm(Optional 200mm)

最大300mm

Probe pressure

0.03-100mg

Sample stage

150*150mm(Optional 200*200mm)

300*300mm

Maximum sample thickness

50mm(Optional 100mm)

Sample table rotation

360 degree

Sample table tilt

4 degree

Stress analysis

Yes