The cleaning equipment is a wet processing equipment, which can handle the cleaning process of ACT 915, IPA and DIW. The equipment shell is made of 304 stainless steel wire drawing board, and the tank body is made of 316L electrolytically polished stainless steel. Fast drainage trough supports bottom water injection, top spray, fast drainage.
The hardware of the system is controlled by PLC, in particular, an input is obtained from the state sensor, which controls and monitors some functions of the system. The operator operates through a color touch screen. The software is completely controlled in the state of input password. The composition of the machine and the monitoring of each slot, as well as the various editing of the menu, are controlled.