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Silicon Wafer Slicing

Published on:2017-12-27 Author:3138150

Wafer processing


Application Notes: advantage:
  • Microelectromechanical Processing
    Surface grooving
    Advanced Packaging Process
    Wafer slicing
  •  
  • High yield
    Good dimensional consistency
    High Density Machining
    Machinable arbitrary shape
    Small heat affected zone
    dry machining
    Suitable for Thin Materials
  •  

       
Low-k slot drill hole drill hole Scribing

 

Processing Technical Indicators(单位:µm)

Borehole thickness

Outlet aperture

Φout

import and export differences

Φin-out

cutting

Slotting

Character carving

250µm

<100

15~25

thickness

Chip Size

Cutting width

45~60

character height

>150

300~1000

40~80

<200

200*200

   

>1000

75~100

<500

500*500

Cutting depth

45~60

500μm

<100

20~35

 

300~1000

50~90

>1000

80~140

700μm

<100

30~40

 

300~1000

120~180

>1000

150~220

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