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    BGS6341型电子薄膜应力分布测试仪系列

    Applied to the semiconductor industry:

    Sensor and Chip-Laser

    Product brand

    BGS6341

    Delivery period:

    再议Day

    In stock:

    100

    Place of origin:

    China-北京市

    Quantity:

    cut back increase

    price:

    Negotiable
    Transaction guarantee Secured Transactions Online banking to pay

    Brand:BGS6341

    model:

    Own series:Sensor and Chip-Laser

     主要用途、功能及特点

    该仪器是为解决微电子、光电子科研与生产中基片平整度及薄膜应力分布的测试而设计的。它通过测量每道工序前后基片面形的变化(变形)来测量曲率半径的变化及应力分布,从而计算薄膜应力。广泛应用于半导体器件工艺研究及质量控制,为改善半导体器件可靠性提供测试数据。

    本仪器适用于测量Si、Ge、CaAs等半导体材料的基片平整度,以及氧化硅、氮化硅、铝等具有一定反光性能的薄膜的应力分布。

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