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    ALICAT防爆型气体质量流量计/控制器

    Applied to the semiconductor industry:

    Sensor and Chip-MFC

    In stock:

    999

    Place of origin:

    United States

    Quantity:

    cut back increase

    price:

    Negotiable
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    ¥10000.00

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    Own series:Sensor and Chip-MFC

     ALICAT防爆型气体质量流量计/控制器

    l 差压原理,具有防爆认证

    l 量程范围:从0-0.5SCCM到0-4000SLPM

    l 压力范围:1MPa

    l 响应时间:流量计10ms/控制器100ms

    l 精度:±(0.8%读数+0.2%满量程)

    l 可选±(0.4%读数+0.2%满量程)

    l 认证:ATEX、CSA,Class 1Division 2

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