Service Hotline
00864006988696
 
  
 
   
   
Consumer Hotline:00864006988696
 
                Negotiable
 
                ¥0.05
 
                Negotiable
 
                Negotiable
 
                Negotiable
电子气质量规格如下:
(1)电子级三氯氢硅及二氯二氢硅
| 
 项目 | 产品指标 | 
| 纯度 | ≥99.99wt% | 
| 电阻率 | ≥1000Ω.cm | 
| 砷+磷 | 0.04ppba | 
| 硼 | ≤0.01ppba | 
| 铝 | ≤1.00ppb | 
| 铁 | ≤0.2ppbw | 
(2)六氯二硅烷
| 项目 | 产品指标 | 
| 纯度 | ≥99.95wt% | 
| 铝 | ≤10ppb | 
| 铁 | ≤10ppb | 
| 钛 | ≤10ppb | 
| 其它金属杂质 | ≤5ppb | 

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