Service Hotline
4001027270
Consumer Hotline:00864001027270
Negotiable
¥0.05
Negotiable
Negotiable
Negotiable
电子气质量规格如下:
(1)电子级三氯氢硅及二氯二氢硅
项目 |
产品指标 |
纯度 |
≥99.99wt% |
电阻率 |
≥1000Ω.cm |
砷+磷 |
0.04ppba |
硼 |
≤0.01ppba |
铝 |
≤1.00ppb |
铁 |
≤0.2ppbw |
(2)六氯二硅烷
项目 |
产品指标 |
纯度 |
≥99.95wt% |
铝 |
≤10ppb |
铁 |
≤10ppb |
钛 |
≤10ppb |
其它金属杂质 |
≤5ppb |
If you have any questions before purchasing, please contact us.