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Current Position: Home » Consumable » Proc-Equip Consumable » Others » 其它 »中小尺寸光罩
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    中小尺寸光罩

    Applied to the semiconductor industry：

    Proc-Equip Consumable-Others-其它

    In stock：

    10000

    Place of origin：

    China-广东省

    Quantity：

    cut back increase

    Price：

    Negotiable
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    Brand：

    Model：

    Own series：Proc-Equip Consumable-Others-其它

     
    中小尺寸光罩
     

    主要应用领域：
    IC Bumping、IC载板、IC Lead frame等相关行业；
    LED(PSS)、MEMS、SENSOR和ENCODER等精细电子元器件行业。
    Applications：
    IC Bumping、IC Substrate,IC Lead frame and other related industry；
    LED(PSS)、MEMS、SENSOR、ENCODER and other fine components industry.

    铬版精度 Chrome Mask Specifications （Standard Size:6inch Quartz)

    精度 / 级别
    Items / Class    		 最高精度
    Grade 1    		 高精度
    Grade 2    		 中精度
    Grade 3    		 一般精度
    Grade 4
    最小线宽/线缝
    Min.Line/Space Width    		 1.0μm/1.0μm 3μm/3μm 5μm/5μm 10μm/10μm
    线条精度
    CD Control    		 ±0.1μm ±0.3μm ±0.5μm ±1.0μm
    总长精度
    Total Pitch Accuracy    		 ±0.25μm ±0.5μm ±0.75μm ±1.0μm
    图形位置精度
    Registration Accuracy    		 ±0.25μm ±0.5μm ±0.75μm ±1.0μm
    套合精度
    Overlay Accuracy    		 ±0.25μm ±0.5μm ±0.75μm ±1.0μm
    垂直精度
    Orthogonality    		 ±0.5μrad ±0.75μrad ±1.0μrad ±2.0μrad

    铬版材料 Substrate(Photomask blank phate)

    材料 Material Soda Lime Glass、Quartz
    常规尺寸Normal Size 3006,4009,5009,6012,6025,7012,9012,12"x12",14"x14"
    厚度 Thickness 1.5±0.2mm,2.3±0.2mm ,3.0±0.2mm ,4.8±0.2mm
    6.35±0.2mm (QZ),8.0±0.2mm (QZ)
    铬膜 Film Type Low Reflectance Chrome
    光学密度
    Optical Density(λ=450nm)    		 Between Plates3.0±0.3 In Plate±0.3
    反射率
    Reflectivity(λ=436nm)    		 Between Plates10±5% In Plate±2%

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