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    溅射台SRH-420

    Applied to the semiconductor industry:

    Processing Equipment-PVD-磁控溅射机

    Product brand

    ULVAC

    In stock:

    10

    Place of origin:

    National

    Quantity:

    cut back increase

    price:

    Negotiable
    Transaction guarantee Secured Transactions Online banking to pay

    consumer hotline:00864001027270

    Brand:ULVAC

    model:

    Own series:Processing Equipment-PVD-磁控溅射机

    极限压强:成膜室 6.7*10-5Pa
    设备构成:1个L/LU室+最多3个工艺室
    溅射方向:向下溅射
    基板尺寸:直径100-200mm
    排气系统:LL室,刻蚀室,分子泵,成膜室,低温泵
    控制系统:PC触摸式操作屏
    搬送系统:多腔体方式
    选购件:基板加热单元,基板冷却单元,刻蚀单元,多阴极单元
    所需气体:Ar、氮气、干泵用氮气,压力0.5MPa

    详情可咨询:www.yjyco.cn

    advisory

    If you have any questions before purchasing, please contact us.

    Question:
     
    Ask

    请问设备使用的靶材是平面型的还是辊型的?靶材的利用率能达到67%吗?

    dfft  2017-08-03

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