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    E1200-用于科研的卧式炉

    Applied to the semiconductor industry:

    Processing Equipment-Furnace

    Product brand

    Centrotherm

    In stock:

    1000

    Place of origin:

    Germany

    Quantity:

    cut back increase

    price:

    1000.00
    Transaction guarantee Secured Transactions Online banking to pay

    consumer hotline:00864001027270

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    ¥10000.00

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    Brand:Centrotherm

    model:

    Own series:Processing Equipment-Furnace

     

    centrotherm E1200专为用于科研项目而设计的,适用于小批量生产和高性能用户,对各种要求的高工艺具有的灵活性。

    centrotherm E1200小批量实验室系统,支持多种工艺能力,适用小批量生产和高性能用户,在较小占地面积上即可提供批量生产的所有特征

     

    适用于常压以及LPCVD和PECVD工艺
    特殊工艺腔体3或4种版本可供选择
    先进的冷却系统:不同炉管之间没有热干扰
    全自动片架传送系统
    模块化部件设计,便于在洁净室安装调试

    •  
    •  
    • 可达5层石英管或SiC管反应腔[硅片可达200mm]
      可选择工艺腔体
    • 洁净自动化的装舟用于特级硅片工艺或其它衬底处理
    • 全自动片架传送系统,工艺硅片尺寸可达200mm(E2000)
    • 先进的冷却系统: 不同炉管之间没有热干扰
    • 对洁净室环境温度无影响
    • 模块化部件设计便于在洁净室安装调试

     

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