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    E1550-初步小规模生产的卧式炉

    Applied to the semiconductor industry:

    Processing Equipment-Furnace

    Product brand

    Centrotherm

    In stock:

    1000

    Place of origin:

    China-上海市

    Quantity:

    cut back increase

    price:

    1000.00
    Transaction guarantee Secured Transactions Online banking to pay

    consumer hotline:00864001027270

    Brand:Centrotherm

    model:

    Own series:Processing Equipment-Furnace

     

    E1550

    初步小规模生产的卧式炉

     

    centrotherm E1550 最优化系统,支持多种工艺能力,适用于中等生产能力和高工艺性能用户,是一款安全、可靠、易于维护的卧式扩散炉平台。该炉可高达4层石英管或SiC工艺管, 其硅片尺寸可达300毫米的。凭借其低维护和运行成本、及占地面积小等优势, E1550 可以生产出极具成本效益的产品。

     

    适用于常压以及LPCVD和PECVD工艺
    特殊工艺腔体3或4种版本可供选择
    先进的冷却系统:不同炉管之间没有热干扰
    全自动片架传送系统
    模块化部件设计,便于在洁净室安装调试

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