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    离子束设备制造

    Applied to the semiconductor industry:

    Processing Equipment-Others-其他

    In stock:

    100

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    National

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    湖北江海行集团与武汉大学签订了产学研合作协议,成立了离子加工与表面工程技术中心、离子束纳米加工技术国际科技合作基地。团簇离子源和团簇离子束设备的研制,提高我国离子束设备和仪器产品的竞争力,带动上百亿元的关联产业和市场。相关受益产业包括:

    (1)离子束设备制造包括团簇源、离子注入机的研发和生产,提高设备的国产化水平,促进常规离子束设备升级换代,提高新型高端离子束设备设计制造水平。

    (2)半导体器件产业大规模集成电路制造、亚纳米表面平化半导体刻蚀、精密光学元件的离子束修形

    (3)团簇离子束沉积:主要用于制备超薄类金刚石薄膜(超薄涂层机械零部件、超硬涂层刀具)、亚纳米二维材料(石墨烯、石墨烯相氮化碳、硅烯、硫化钼、硒化钨等)。


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