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    干涉仪

    Applied to the semiconductor industry:

    Second-hand equipment-Testing

    Product brand

    zygo

    In stock:

    4

    Place of origin:

    National

    Quantity:

    cut back increase

    price:

    Negotiable
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    Brand:zygo

    model:

    Own series:Second-hand equipment-Testing

     (一)、激光干涉仪的使用范围和基本要求:

      1. 主要应用于对数控机床,三座标测量机等高精度的数控设备进行位置精度,几何精度,工作精度的检测与校准。

      2. 仪器要求适用于国际最新检测方法,世界知名品牌,国内用户至少100家以上,国内要有完善的售前售后服务机构。

      3. 激光器拍频精度达到±0.05ppm, 
    系统测长精度达到±0.5ppm(0-40ºC)。

    3.1 
    XL-80 线性测长:

      
    XL-80 线性测长精度: ±0.5ppm(0-40摄氏度)

      
    线性测量范围: 0-40米

      
    最高测长分辨率: 0.001微米

      
    最高测量速度: 240米/分钟

      
    激光头外部供电范围:90V-264V

     
    3.2 小角度测量:

      

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