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扬州市神州科技有限公司成立于2003年,现有专业技术人员40人, 员工50人, 专业从事射频等离子体电源的维修、维护及销售,主要服务内容包括:为半导体工厂,液晶面板工厂等提供AE, MKS(ENI), DAIHEN, AD-TEC, KYOSAN, RFPP等国际品牌的射频电源、直流电源、匹配器、RPS及各类半导体设备维修、销售、客户方案定制与老式机型替代,并提供现场支持服务。
公司主要客户:TSMC, HYNIX, SMIC, IVO, JCAP, MEMSIC, HHNEC, SZ TIANMA, HEJIAN, JA SOLAR,SONY, TOSHIBA, BEST SOLAR等。
二、产品介绍
AE Dressler Cesar 1330 13.56MHz 3000W 射频电源
Specification | |
Frequency | 13.560 MHz +/- 0.005% |
Max output power | 3000 W into a 50??load |
Min output power | 30 W into a 50??load |
Reflected power limit | 600 W |
Delivered power into mismatch | 20% depending on the load impedance |
Load impedance | 50?? |
RF connector | 50??, 7/16 type, female |
RF power regulation mode | P forward, P delivered, or DC selfbias voltage |
Regulation (of set point) | 1.0 or 0.1% of full-rated power, whichever is greater, into a 50??load |
Response time (ms) | \ |
Turn off/decay time (ms) | \ |
Harmonics | -45 dBc at full-rated power |
Spurious content | -60 dBc max at full-rated power |
Pulse mode | Yes |
Pulse repetition frequency | 1 to 30 kHz |
Pulse duty cycle | 1% to 99% |
Pulse RF envelope rise / fall time (ms) | \ |
CEX operation mode | Yes |
CEX input signal as required | 0 to +10 dbm |
CEX output signal specifications | +3 to +10 dbm |
CEX connector (50??) | BNC, female |
Display | LCD graphic display |
256 x 132 dots , black / white |
更多产品信息请与我们联系!
三、品质保障
我们所销售的电源、匹配器及RPS等如无特殊说明,均提供6个月的免费保修服务。
我们为销售产品提供终身维修服务,并可提供EXCHANGE服务,保证客户的生产正常进行。
四、运输
我们为所有出厂的机器提供最结实的包装,保证运输过程中机器的安全。
If you have any questions before purchasing, please contact us.