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Scope of service:
Engaged in research and development of high-power RF power supply & third-party maintenance supplier, research and maintenance of PVD, CVD, solar photovoltaic, semiconductor, LCD panel, coating industry, etc.
PECVD, MOCVD, ION IMP, PLASMA equipment power supply, including DC, high voltage, pulse, radio frequency, microwave, matcher, RPSC, CHILLER.
Service advantages:
With a number of professional and technical personnel, imported brand RF power supply senior engineering technology support, digestion and absorption of foreign advanced technology on the basis of innovation and development, training more than a dozen experienced maintenance engineers. It has self-developed professional supporting RF power supply test platform, high-voltage power supply test load, DC power supply test load, special testing instruments and equipment, as well as rich drawings and technical information.
Service brand:
AE (Advanced Energy), ENI (MKS), KYOSAN Jingsan, SEREN, DAIHEN, COMDEL, VEECO RF power supply,
HiTek Power, Glassman, Spellman High Voltage Power Supply, Lambda, delta, sorensen, PowerTEN DC Power Supply.
ASTeX Microwave Power Supply, ASTeX SMART MATCH, FLASH LAMP, ESC HV PSU.
Power maintenance
Professional maintenance of semiconductor equipment power supply, mainly high-voltage power supply, frame controllable high-power DC power supply, etc.
Maintenance of RF Generator, Microwave Power Supply, RF Match, Smart Match, RPSC and other professional equipment.
Thermo Chiller Maintenance
Temperature control pump, equipment cooling system, brand SMC, Komatsu, Dajin, Shenhe, etc.
I. RF Generator RF Power Supply Maintenance and Supplementary DC Power Supply
1. AE (ADVANCED ENERGY) RF/DC power supply
2. MKS ENI RF/DC power supply
3. DAIHEN RF Power Supply
4. KYOSAN RF/DC power supply
5. COMDEL RF Power Supply
6. ADTEC RF Power Supply
7. SEREN RF Power Supply
2. RF MATCH (Radio Frequency Power Matching Network)
1. AE (Advanced Energy) RF Match Network
2. LAM RF Match Network
3. AMAT RF Match Network
4. SEREN RF MATCH NETWORK
5. DAIHEN RF Match Network
6. SEREN RF Match Network
3. High Voltage Power Supply
1. HiTek Power Supply High Voltage Power Supply
2. ADVANCE HIVOLT High Voltage Power Supply
3. Wallis Hivolt (Farnell Hivolt) High Voltage Power Supply
4. GLASSMAN High Voltage Power Supply
5. SPELLMAN High Voltage Power Supply
6. Varian High Voltage Power Supply
7. Other Brands
IV. DC Power Supply
1. LAMDBA ESS/EMI DC Power Supply
2. Delta ELEKTRonIKA DC Power Supply
3. SORENSEN DC Power Supply
4. AMETEK Programmable Power Supply
5. POWER TEN DC Power Supply
6. Filament Power Supply and X-ray Power Supply
7. Exposure lamp power supply USHIO (Mercury lamp power supply)
V. Microwave Power Generator
1. ASTeX AGL Series Microwave Generator
2. MUEGGE Microwave Power Supply Microwave Power Supply
3. ASTeX Smart Match
Six, RPSC
MKS 2L
MKS 3L
MKS 6L
MKS 8L
MKS 15L
MKS 22L
CHILLER Temperature Control Pump
SMC INR-341-16A
SMC INR-498-011
SMC INR-244-215
SMC-INR-244-117A
Engaged in research and development of high-power RF power supply & third-party maintenance supplier, research and maintenance of PVD, CVD, solar photovoltaic, semiconductor, LCD panel, coating industry, etc.
PECVD, MOCVD, ION IMP, PLASMA equipment power supply, including DC, high voltage, pulse, radio frequency, microwave, matcher, RPSC, CHILLER.
Service advantages:
With a number of professional and technical personnel, imported brand RF power supply senior engineering technology support, digestion and absorption of foreign advanced technology on the basis of innovation and development, training more than a dozen experienced maintenance engineers. It has self-developed professional supporting RF power supply test platform, high-voltage power supply test load, DC power supply test load, special testing instruments and equipment, as well as rich drawings and technical information.
Service brand:
AE (Advanced Energy), ENI (MKS), KYOSAN Jingsan, SEREN, DAIHEN, COMDEL, VEECO RF power supply,
HiTek Power, Glassman, Spellman High Voltage Power Supply, Lambda, delta, sorensen, PowerTEN DC Power Supply.
ASTeX Microwave Power Supply, ASTeX SMART MATCH, FLASH LAMP, ESC HV PSU.
Power maintenance
Professional maintenance of semiconductor equipment power supply, mainly high-voltage power supply, frame controllable high-power DC power supply, etc.
Maintenance of RF Generator, Microwave Power Supply, RF Match, Smart Match, RPSC and other professional equipment.
Thermo Chiller Maintenance
Temperature control pump, equipment cooling system, brand SMC, Komatsu, Dajin, Shenhe, etc.
I. RF Generator RF Power Supply Maintenance and Supplementary DC Power Supply
1. AE (ADVANCED ENERGY) RF/DC power supply
2. MKS ENI RF/DC power supply
3. DAIHEN RF Power Supply
4. KYOSAN RF/DC power supply
5. COMDEL RF Power Supply
6. ADTEC RF Power Supply
7. SEREN RF Power Supply
2. RF MATCH (Radio Frequency Power Matching Network)
1. AE (Advanced Energy) RF Match Network
2. LAM RF Match Network
3. AMAT RF Match Network
4. SEREN RF MATCH NETWORK
5. DAIHEN RF Match Network
6. SEREN RF Match Network
3. High Voltage Power Supply
1. HiTek Power Supply High Voltage Power Supply
2. ADVANCE HIVOLT High Voltage Power Supply
3. Wallis Hivolt (Farnell Hivolt) High Voltage Power Supply
4. GLASSMAN High Voltage Power Supply
5. SPELLMAN High Voltage Power Supply
6. Varian High Voltage Power Supply
7. Other Brands
IV. DC Power Supply
1. LAMDBA ESS/EMI DC Power Supply
2. Delta ELEKTRonIKA DC Power Supply
3. SORENSEN DC Power Supply
4. AMETEK Programmable Power Supply
5. POWER TEN DC Power Supply
6. Filament Power Supply and X-ray Power Supply
7. Exposure lamp power supply USHIO (Mercury lamp power supply)
V. Microwave Power Generator
1. ASTeX AGL Series Microwave Generator
2. MUEGGE Microwave Power Supply Microwave Power Supply
3. ASTeX Smart Match
Six, RPSC
MKS 2L
MKS 3L
MKS 6L
MKS 8L
MKS 15L
MKS 22L
CHILLER Temperature Control Pump
SMC INR-341-16A
SMC INR-498-011
SMC INR-244-215
SMC-INR-244-117A
