ENI GHW-12A 13.56MHz(1250W)射频电源维修及销售_UPS Power_Second-hand equipment_Equipment

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一、公司介绍

工程工作现场全景

扬州市神州科技有限公司成立于2003年，现有专业技术人员40人, 员工50人, 专业从事射频等离子体电源的维修、维护及销售，主要服务内容包括：为半导体工厂，液晶面板工厂等提供AE, MKS(ENI), DAIHEN, AD-TEC, KYOSAN, RFPP等国际品牌的射频电源、直流电源、匹配器、RPS及各类半导体设备维修、销售、客户方案定制与老式机型替代，并提供现场支持服务。
公司主要客户：TSMC, HYNIX, SMIC, IVO, JCAP, MEMSIC, HHNEC, SZ TIANMA, HEJIAN, JA SOLAR,SONY, TOSHIBA, BEST SOLAR等。

二、产品介绍

GHW-12A / 13.56 MHz / 1250 W 射频电源

Rated Power Output (into 50 ohm load)	1250 W
Frequency/Stability	13.56MHz ±0.005%
Dynamic Power Range	10 - 1250W
Load Impedance Range	Unlimited
RF Stability/Spurious Output	Unconditionally stable for any load within operational limits < -45dBc
Harmonic Output & Distortion	< -40dBc
Load Mismatch Protection	Automatic; forward power limits typically 0.25ms after reverse power reaches a pre-programmed level≤16% of rated power.
Regulation Tolerance	> 125 W: ±1.5% SP < 125 W: ± 3.0 W
Primary AC Power Source	200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
Cooling System	Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at +5°C to +35°C. Connections provided to accept 1/4” male (NPT) pipe thread.
Power Readout	Digital readout displays frequency and forward, reflected and load power.
Safety Compliance	NRTL Listed: UL3111-1 (1994) CAN/CSA C22.2 No. 1010.1-92 EN61010-1:1993; A2:1995
EMC Compliance	EN50081-2: 1992 EN50082-2: 1995
Weight	32.5 lbs. (14.8 kg)
Dimensions (H x W x D) (excluding handles & connectors)	3.5” x 19” rack mount x 20.0” (89 x 483 x 508 mm.)
Remote Interface Connectors	Standard: RS-232 Subminiature Type-D 9-pin digital; optional custom interface cards available.
RF Output Connector	Type N
Rack Mounting	EIA (Standard) 19-inch adapters supplied