Website Homepage
Shopping cart
User center
Product Category
Prompt message
inquiry experts experts
Service Hotline
4001027270
扬州市神州科技有限公司成立于2003年，现有专业技术人员40人, 员工50人, 专业从事射频等离子体电源的维修、维护及销售，主要服务内容包括：为半导体工厂，液晶面板工厂等提供AE, MKS(ENI), DAIHEN, AD-TEC, KYOSAN, RFPP等国际品牌的射频电源、直流电源、匹配器、RPS及各类半导体设备维修、销售、客户方案定制与老式机型替代，并提供现场支持服务。
公司主要客户：TSMC, HYNIX, SMIC, IVO, JCAP, MEMSIC, HHNEC, SZ TIANMA, HEJIAN, JA SOLAR,SONY, TOSHIBA, BEST SOLAR等。
二、产品介绍
AE Paramount 6013 6000W(13.56MHz)射频电源
| Electrical | |
| Output Power | |
| RF Power | 6 kW |
| Regulation Modes | Standard: Forward, load |
| available: output voltage, external feedback loop | |
| Frequencies | 13.56 mHz |
| Frequency tuning ±5% | |
| Frequency Resolution | 1 Hz |
| Max Reflected Power | 600 w, selectable |
| Power Accuracy | into 50 Ω: ±1 w or ±1% of set point, whichever is greater |
| into 3:1 VSwr: ±1 w or ±2% of set point, which ever is greater | |
| Input Power | 200/208 VaC ±10%, 50 to 60 Hz ±3 Hz |
| Available Features | |
| Pulse Mode | Pulsing frequencies: 10 Hz to 100 kHz |
| Pulsing duty cycle: 10 to 90% | |
| Pulse Synchronization | master/slave pulse coordination |
| individually programmable pulse on- and off-times | |
| Frequency Tuning | < 10 ms tune time |
| Arc Management | Programmable arc-management parameters, including detect |
| time, shutdown time, and voltage level | |
| Phase Synchronization (CEX) | output waveform synchronization for connected power supplies |
| user-adjustable phase offset, 0 to 359° | |
| HALO | High accuracy, low output performance |
| Connector and Cable Specifications | |
| Output Power | Female Hn |
| Input Power | Standard: Harting ® Han-Q with switch |
| available: Harting ® Han-Q without switch | |
| User Port | 25-pin, female, sub-miniature D |
| Host Port | 9-pin, female, sub-miniature D |
| I/O Control | |
| Analog Interface | 25-pin, female, sub-miniature D |
| Serial Interface | Standard: rS-232, ethernet |
| available: ethernet, Devicenet ® , Profibus, etherCat ® | |
更多信息请与我们联系！
三、品质保障
我们所销售的电源、匹配器及RPS等如无特殊说明，均提供6个月的免费保修服务。
我们为销售产品提供终身维修服务，并可提供EXCHANGE服务，保证客户的生产正常进行。
四、运输
我们为所有出厂的机器提供最结实的包装，保证运输过程中机器的安全。
