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    扩散炉

    Applied to the semiconductor industry:

    Processing Equipment-Furnace-管式炉

    Product brand

    青岛育豪

    In stock:

    1

    Place of origin:

    China

    Quantity:

    cut back increase

    price:

    Negotiable
    Transaction guarantee Secured Transactions Online banking to pay

    consumer hotline:00864001027270

    Hot products

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    ¥10000.00

    Concerned Products

    Brand:青岛育豪

    model:

    Own series:Processing Equipment-Furnace-管式炉

     按照用户需求设计生产
    系统组成:扩散炉主机、推拉舟及净化工作台、气源柜、排毒柜、微机控制柜
    扩散炉管数:
    1~4
    主要技术指标:
    ★炉管内径:
    ¢90~¢3502英寸~8英寸)   
    ★恒温区长度及精度:≤
    1000mm±0.5℃300℃~1290℃
    ★控温仪表:进口高精度控温仪   
    ★气源路数:主管道
    1~4路   
    ★气体种类:
    N2H2O2HCL
    ★气源控制:
    MFC或浮子流量计   
    ★推拉舟行程:最大
    2000mm
    ★推拉舟速度范围及精度:(
    20~1000±2mm/min    
    ★推拉舟方式:简易式、悬臂式、
    SiC硅桨式
    ★冷却方式:水冷
    +风冷    
    ★工控机:工控机控制
    设备特性:
    具有多条工艺曲线,调用方便快捷;运行中,具有停电记忆功能;
    触摸微机界面,操作方便;具有超温保护功能

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