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    ADT晶圆划片清洗机WCS-977

    Applied to the semiconductor industry:

    Cleanning Equipment

    Product brand

    ADT

    In stock:

    1

    Place of origin:

    National

    Quantity:

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    price:

    Negotiable
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    Brand:ADT

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    Own series:Cleanning Equipment

     

    品牌:ADT
    型号:WCS-977

    主要功能:用于晶圆划片后芯片表面残留物的清洗,避免表面沾污、微粒影响后继封装工艺。

    应用领域:芯片
    切割 最大支持8寸晶圆,该设备为划片工艺后之晶圆连同绷框置于旋转的吸盘上面,藉真空吸盘吸住晶圆。 吸盘下方为变频马达用于清洗、吹干及旋干时之转动。 利用步进马达转动二流体喷嘴及喷气嘴,借以喷洒清洗剂及清除切屑、杂质及吹干水份。

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