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    NeuTech真空光学镀膜机

    Applied to the semiconductor industry:

    Processing Equipment-PVD-电子束蒸发

    In stock:

    10

    Place of origin:

    National

    Quantity:

    cut back increase

    price:

    Negotiable
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    Brand:

    model:

    Own series:Processing Equipment-PVD-电子束蒸发

     品牌:NeuTech
    型号:1300
    规格:内腔1300
    重量:3000KG
    外形尺寸:内径1300
    标准箱数:1台
    特点:
    1. 中外技术整合
    2. 基于20年使用经验,从使用者角度出发的全新设计
    3. 一流性价比
    4. 60%进口零部件,产品质量重点保证
    5. 产品主要参数:
    项目
    参数
    极限真空
    低于9.0E-5pa
    恢复真空
    10min内达到3.0E-3pa
    保真空
    低于9.0E-2pa
    温度均匀性
    280℃±10℃(30min加热后)
    成膜均匀性
    小于5nm
    成膜再现性
    小于5nm
    成膜控制
    专业全自动软件控制

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