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    蒸发台EI-5Z

    Applied to the semiconductor industry:

    Processing Equipment-PVD-电子束蒸发

    Product brand

    ULVAC

    In stock:

    10

    Place of origin:

    National

    Quantity:

    cut back increase

    price:

    Negotiable
    Transaction guarantee Secured Transactions Online banking to pay

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    ¥10000.00

    Concerned Products

    Brand:ULVAC

    model:

    Own series:Processing Equipment-PVD-电子束蒸发

    一、基板
    材料:Si、Mo、Glass、GaN、GaAs等
    尺寸直径:2-8英寸圆片及各种形状的基板
    二、真空条件
    油旋片泵+低温泵U16P
    极限压强:小于3.0*10-6Pa
    排气速度:20分钟内达到3.0*10-6Pa
    三、成膜
    蒸发源:电子束式,10KW/16KW,坩埚型号20cc、40cc、110cc(可选),热阻式:备选。
    行星式:公转式,卫星式
    基板内:基板均匀性在5%以内
    四、加热方式
    红外灯加热,最高350℃
    五、操作模式
    GPCS-2700触摸屏控制,PC+PLC

    详情请咨询www.yjyco.cn

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