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    扩散炉(微控)

    Applied to the semiconductor industry:

    Processing Equipment-Furnace-管式炉

    Product brand

    赛尔微

    In stock:

    10

    Place of origin:

    National

    Quantity:

    cut back increase

    price:

    Negotiable
    Transaction guarantee Secured Transactions Online banking to pay

    consumer hotline:00864001027270

    Brand:赛尔微

    model:

    Own series:Processing Equipment-Furnace-管式炉

     微控扩散炉应用:应用于集成电路、分立器件、光电子器件、电力电子器件、太阳能电池等领域,适用2~8英寸工艺尺寸

    产品特点: 
    主机为水平一至四管炉系统构架,能独立完成不同的工艺或相同工艺 
    工业计算机控制系统,对炉温、进退舟、气体流量、阀门等动作进行全自动控制 
    采用悬臂式送片:操作方便、无摩擦污染等 
    关键部件采用进口器件,确保设备的高可靠性 
    工艺管路采用进口阀门管件组成-气密性好、耐腐蚀、无污染(管路均采用EP级电抛光管路),气体流量采用质量流量计(MFC)控制 
    控温精度高,温区控温稳定性好; 
    具有断电报警、超温报警、极限超温报警等多种安全保护功能 
    高质量的加热炉体,确保恒温区的高稳定性及长寿命

     

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