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    ASML PAS 5000/55

    Applied to the semiconductor industry:

    Processing Equipment-Lithography-步进光刻机

    Product brand

    ASML PAS 5000/55

    In stock:

    100

    Place of origin:

    National

    Quantity:

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    price:

    Negotiable
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    Brand:ASML PAS 5000/55

    model:

    Own series:Processing Equipment-Lithography-步进光刻机

     一、基本参数:

        工    艺:I线光刻机

        工艺能力:0.5微米

        衬底尺寸:4英寸、5英寸、6英寸、8英寸

    传片方式:皮带单片传送,片架到片架传送

    二、设备配置:

        硅片传输系统

        掩膜版自动传输系统

        633nm激光对准系统

    照明系统500W汞灯光源,365nm波长

    二维精密XY工作台

        预对准系统

        环境控制器

    三、工艺指标

    PAS5000光刻机是ASML公司生产的I线步进式光刻,其投影背率5:1,曝光波长为365nm,分辨率为0.5um,最大曝光场大小为15mm*19mm。设备匹配对准精度0.1um。

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