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Current Position: Home » Equipment » Testing Equipment » Surface Detection » 表面轮廓仪 »Probe Profiler
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    Probe Profiler

    Applied to the semiconductor industry：

    Testing Equipment-Surface Detection-表面轮廓仪

    Product brand

    SCI

    Specification model：

    NanoMap-500LS

    In stock：

    100

    Place of origin：

    United States

    Quantity：

    cut back increase

    price：

    ￥10000.00
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    Brand：SCI

    model：NanoMap-500LS

    Own series：Testing Equipment-Surface Detection-表面轮廓仪

    NanoMap-500LS Probe Three-dimensional Profiler (Step Instrument)

    Model

    NanoMap-500LS

    NanoMap-LS

    NanoMap-ES

    Basic technical parameters

    With two modes of Tip and Stage, not only long-range and large-area measurements can be completed, but also the optimal two-dimensional/three-dimensional observation maps in small areas can be obtained. Short-range probe scanning adopts precise piezoelectric ceramic drive scanning mode, the three-dimensional scanning range is from 10 micron X 10 micron to 500 micron X 500 micron, with sub-nanometer vertical resolution (minimum 0.1 nanometer); long-range sample table scanning uses advanced optical reference platform, which can make the scanning range reach 150 mm. These two scanning modes provide users with precise and fast scanning respectively. It is suitable for all-material measurement and can accept almost any material surface. In the process of scanning, the sample can be observed directly with color optical camera.

    Step repetition rate

    5A

    Fine mode Z height range

    5μm

    Coarse Mode Z Height Range

    500μm(Optional 1.5mm)

    Tip Scan Model (XY)

    Max500μm

    NO

    最大500μm

    Stage Scan Model (XY)

    Max150mm(Optional 200mm)

    最大300mm

    Probe pressure

    0.03-100mg

    Sample stage

    150*150mm(Optional 200*200mm)

    300*300mm

    Maximum sample thickness

    50mm(Optional 100mm)

    Sample table rotation

    360 degree

    Sample table tilt

    4 degree

    Stress analysis

    Yes
           
       
       
       
       
           
         
       
         
       
       
       
       

     

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