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    太阳能CIGS薄膜镀膜机 沈阳金研

    Applied to the semiconductor industry:

    Processing Equipment-PVD-电子束蒸发

    In stock:

    100

    Place of origin:

    China-辽宁省

    Quantity:

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    Own series:Processing Equipment-PVD-电子束蒸发

    太阳能CIGS薄膜镀膜机 沈阳金研

    1、设备用途: 采用电子束一步蒸发法用于制备CIGS(铜铟镓硒)薄膜

    2.技术数据:
    基片尺寸 1100mm×1400mm 基片加热温度 300℃
    工作真空度 6.7×10-4Pa    
    2.1镀膜模式进片室+清洗室+镀膜室+缓冲室+出片室
    2.2镀膜室EB蒸发源三个
    2.3 EB蒸发源挡板三个
    2.4膜厚修正机构二套
    2.5控制方式PID可编程控,全自动

    3.技术型号:JCIGS-1型

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