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    Surface Treatment System

    Applied to the semiconductor industry:

    Cleanning Equipment-Plasma Cleaning-真空等离子清洗机

    Product brand

    FEMTO

    Specification model:

    COVANCE-MPR

    In stock:

    10

    Place of origin:

    National

    Quantity:

    cut back increase

    price:

    Negotiable
    Transaction guarantee Secured Transactions Online banking to pay

    Brand:FEMTO

    model:COVANCE-MPR

    Own series:Cleanning Equipment-Plasma Cleaning-真空等离子清洗机

    COVANCE-MPR 等离子表面处理系统 产品规格

    真空室:190 × 240 × 160(W × D × H / mm)
    气 路:标准一路气体(最多3路气体,MFC)
    电 源:50kHz,200W
    操作界面:全自动&手动操作(触摸屏模式)
    压力监测:大气压~ 1×10-3 Torr
    选配项:电源功率升级(最大300W)
    射频电源(13.56MHz,最高300W,包括水冷)
    粉末处理系统

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