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Surface Treatment System
Product brand
FEMTO
Specification model:
COVANCE-MPR
In stock:
10
Place of origin:
National
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COVANCE-MPR 等离子表面处理系统 产品规格
真空室:190 × 240 × 160(W × D × H / mm)
气 路:标准一路气体(最多3路气体,MFC)
电 源:50kHz,200W
操作界面:全自动&手动操作(触摸屏模式)
压力监测:大气压~ 1×10-3 Torr
选配项:电源功率升级(最大300W)
射频电源(13.56MHz,最高300W,包括水冷)
粉末处理系统
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