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The patented architecture of Prismo D-BlueTM can accommodate up to 4 reactors, can process up to 216 2-inch wafers simultaneously and will extend to 4, 6 and 8-inch wafer production. Each reactor can be controlled independently—an inventive design that enables exceptional manufacturing flexibility. It is the only tool of its kind with this capability. This means it can process in parallel or sequential mode, which reduces cross-contamination and ensures the high crystalline quality required for advanced LED applications. The tool’s footprint efficiency is unmatched—nearly 30% smaller than comparative single-reactor systems—making the Prismo a smarter fit for today’s LED fabs.
Key Technology Features and Advantages
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