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    PECVD

    Applied to the semiconductor industry:

    Processing Equipment-PVD-PECVD

    In stock:

    1

    Place of origin:

    China-北京市

    Quantity:

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    price:

    Negotiable
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    Own series:Processing Equipment-PVD-PECVD

     EPEE 550是一款面向LED领域的大产能PECVD设备,适用于LED芯片制造中的保护层、SWE掩膜层、CBL等工艺制程
    性能特点:
    • 支持高压工艺,更快的沉积速率;
    • 高功率清洗技术,更好的清洗效果;
    • 支持双频工艺,可控制膜层应力;
    • 加热器三区控温,控温能力更强;
    • 大产能高性价比
    • 大产能,更优的大尺寸晶片容量。

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    请问设备能达到的最高温度多大?热电偶是哪种类型的?

    shangdangshengjie  2017-08-25

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