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    Filmlab-Si100 深硅刻蚀机

    Applied to the semiconductor industry:

    Processing Equipment-Etching-高密度等离子体刻蚀机

    Product brand

    PLSM

    Specification model:

    Filmlab-Si100

    Delivery period:

    合同签订6个月Day

    In stock:

    1

    Place of origin:

    China

    Quantity:

    cut back increase

    price:

    Negotiable
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    consumer hotline:00864001027270

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    ¥10000.00

    Concerned Products

    Brand:PLSM

    model:Filmlab-Si100

    Own series:Processing Equipment-Etching-高密度等离子体刻蚀机

     该设备主要应用于MEMS等微传感器,深结构加工中。
    欢迎咨询,订制。

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    If you have any questions before purchasing, please contact us.

    Question:
     
    Ask

    最深能切多深,最深处的离子束径宽尺寸多大?

    wole  2017-07-28

     您好,我们的设备是等离子体刻蚀设备,不是等离子体切割设备,
    该设备主要用在MEMS工艺中的深硅刻蚀工艺中,
    4inch,6inch wafer 我们都可以刻穿,
    设备是单片式设备,不是cluster,不能跑整个片盒。
    请您慎重考虑,如果您需要深硅刻蚀设备,可以进一步沟通。谢谢

    2017-07-28

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