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    表面形貌测试设备

    Applied to the semiconductor industry:

    Testing Equipment-Surface Detection

    Specification model:

    8寸样品

    Delivery period:

    一个月Day

    In stock:

    500

    Place of origin:

    Germany

    Quantity:

    cut back increase

    price:

    100000.00
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    consumer hotline:00864001027270

    Brand:

    model:8寸样品

    Own series:Testing Equipment-Surface Detection

    机械探针式测量方法[1-3]是开发较早、研究最充分的一种表面轮廓测量方法。它利用机械探针接触被测表面,当探针沿被测表面移动时,被测表面的微观凹凸不平使探针上下移动,其移动量由与探针组合在一起的位移传感器测量,所测数据经适当的处理就得到了被测表面的轮廓。    探针式轮廓仪是高精度的表面轮廓测量仪器,深度测量精度可达到0.1~0.2nm;纵向分辨率取决于与之配套的位移传感器,一般可达到0.1 nm的量级;横向分辨率与针尖半径有关,同时还与被测表面的具体形状有关,一般可达到0.05μm~0.25μm。

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