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Description:
The Surfscan 6200 is a versatile surface inspection tool designed to meet the needs of a broad range of applications. Utilizing the latest developments in optical technology, the system easily detects sub-micron particles on rough surfaces such as polysilicon and tungsten.
Configuration：
Defects Any surface that scatters less than 90% of incident light
Defects sensitivity: 0.12um (>95% capturing rate)
Repeatability: <1.5%
Wafer Type:200mm, notch (SNNF), thickness: 725µm
Laser type:30 mW Argon-Ion laser, 488 nm wavelength
Computer OS :Windows9
