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    OAI 800FSA型光刻机

    Applied to the semiconductor industry:

    Processing Equipment-Lithography-UV光刻机

    Product brand

    OAI

    In stock:

    10000

    Place of origin:

    National

    Quantity:

    cut back increase

    price:

    Negotiable
    Transaction guarantee Secured Transactions Online banking to pay

    consumer hotline:00864001027270

    Brand:OAI

    model:

    Own series:Processing Equipment-Lithography-UV光刻机

     

    800FSA型光刻机系统

     

    OAI 800FSA型光刻机是一种半自动化的光学式顶面掩模对准器。它提供超精密(1μm-2μm)对准精度,并设计为以极具竞争力的价格大大超过任何可比的背面Aligner的性能。多功能800FSA型面罩Aligner非常适合用于小批量生产,研发实验室和大学。

    800FSA型掩模对准器可以配置多种OAI光源,功率高达2KW。掩模对准器工具可容纳高达8英寸正方形的基板,并且晶片卡盘被定位成允许容易地装载和卸载。这种经济实惠的面罩对齐器具有电动自动调平和自动间隙设置。

    建立在振动隔离平台上,固定面罩支架组件保证对准精度和重复性。使用易于读取的PLC触摸屏简化操作。培训时间短;操作者可以在不到一小时内有效地学习使用面罩对准器。

    Model 800FSA Topside Mask Aligner System

    光刻机Model800FSA Topside Mask Aligner 

    The OAI Model 800FSA Mask Aligner is a semi-automated, optical Topside mask Aligner. It delivers ultra-precise (1µm-2µm) alignment accuracy and is designed to greatly surpass the performance of any comparable backside Aligner at an extremely competitive price. The versatile Model 800FSA mask Aligner is ideal for use in low volume production, R&D labs, and universities.

    The Model 800FSA Mask Aligner can be configured with a wide variety of OAI light sources that range in power up to 2KW. The mask Aligner tooling can accommodate substrates up to 8-inch square, and the wafer chuck is positioned to allow for easy loading and unloading. This cost-effective mask Aligner features motorized auto leveling and auto gap setting.

    Built on a vibration isolation platform, the fixed mask holder assembly guarantees alignment accuracy and repeatability. Operation is simplified using the easy-to-read, PLC touch-screen. Training time is short; an operator can learn to use the mask Aligner effectively in less than one hour.

    advisory

    If you have any questions before purchasing, please contact us.

    Question:
     
    Ask

    能提供一下基片的尺寸范围,分辨率、对准精度这些参数吗?

    wole  2017-07-28

    您好, 感谢您咨询我司代理美国OAI光刻机,
    基片的尺寸范围: 8", 可以扩展9"
    分辨率、对准精度: 1UM

    联系人: 廖先生 13538131258, QQ583129932

    2017-08-26

    Ask

    请问最大刻蚀深度多深?最深处刻宽多大?

    1346848  2017-07-26

    Ask

    这个面罩对齐器的电动自动调平和自动间隙设置一般时长多长??

    hunan347  2017-07-07

     你好,方便的话可以加下QQ聊下,方便交流。 QQ:583129932 廖经理 电话:13538131258

    2017-07-07

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